The EUV Pellicle Deflection Tool (PDT) performs pellicle-integrity checks by measuring the rate and amount of deflection, or sagging, of a pellicle through the application of differential pressure across the pellicle’s membrane. Numerous user configurable tolerance bounds allow the operators to ensure each and every pellicle meets the requirements for high-volume production use.

• Tracks the maximum differential pressure and level of deflection in two situations:

• A “normal” mode when the pellicle is used in customary operating conditions

• A more aggressive operating mode that pushes the pellicle beyond normal operating conditions in order to instigate and investigate breakage

• Uses high-speed imaging to capture pellicle ruptures that can later be used for fail-mode analysis

• User-friendly system software

• Low cost of ownership

• Simple facilities connections

• Touchscreen interface

• Integrated cleanliness system for easy cleanup